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The role of oxygen partial pressure and annealing temperature on the formation of w=o bonds in thin wo3 films

Author
Bittencourt, C.; Landers, R.; Llobet, E.; Calderer, J.
Type of activity
Journal article
Journal
Semiconductor science and technology
Date of publication
2002-05
Number
17
First page
522
Last page
525
Group of research
MNT - Micro and Nanotechnologies Research Group

Participants

  • Bittencourt, C  (author)
  • Landers, R  (author)
  • Llobet Valero, Eduard  (author)
  • Calderer Cardona, Josep  (author)