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Resonant pull-in condition in parallel-plate electrostatic actuators

Author
Fargas-Marques, A.; Casals-Terré, J.; Shkel, A.
Type of activity
Journal article
Journal
Journal of microelectromechanical systems
Date of publication
2007-10
Volume
16
Number
5
First page
1044
Last page
1053
DOI
https://doi.org/10.1109/JMEMS.2007.900893 Open in new window
URL
https://ieeexplore.ieee.org/document/4337792/ Open in new window
Abstract
Electrostatic parallel-plate actuators are a common way of actuating microelectromechanical systems, both statically and dynamically. In the static case, the stable actuation voltages are limited by the static pull-in condition, which indicates that the travel range is approximately limited to 1/3 of the initial actuation gap. Under dynamic actuation conditions, however, the stable voltages are reduced, whereas the travel range can be much extended. This is the case with the dynamic pull-in and ...
Keywords
Associate members, Capacitors, Electrostatic actuators, Gyroscopes, Microelectromechanical devices, Microelectromechanical systems, Micromechanical devices, Resonance, Springs, Voltage
Group of research
MICROTECH LAB - Microtechnology for the Industry

Participants