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Design, fabrication and characterization of an externally actuated ON/OFF microvalve

Author
Casals-Terré, J.; Duch, M.; Plaza, J.; Esteve, J.; Perez Castillejos, Raquel; Valles, E.; Gómez, E.
Type of activity
Journal article
Journal
Sensors and actuators A. Physical
Date of publication
2008-10
Volume
147
Number
2
First page
600
Last page
606
DOI
https://doi.org/10.1016/j.sna.2008.06.022 Open in new window
URL
https://www.sciencedirect.com/science/article/pii/S0924424708003476 Open in new window
Abstract
A magnetic microfluidic valve has been designed, fabricated and tested. Operation relies on the use of a permanent magnet which interacts with an electrodeposited layer of Co–Ni (soft magnetic material) on a V-shaped cantilever beam. The deflection caused by the magnetic forces opens or closes the fluid flow. The microvalve performance has been optimized by means of finite element analysis (FEA). The FEA model has been experimentally validated using confocal microscopy and used to improve the ...
Keywords
Check-valve, Magnetic–structural analysis, ON/OFF microvalve
Group of research
MICROTECH LAB - Microtechnology for the Industry

Participants

  • Casals Terre, Jasmina  (author)
  • Duch Llobera, Marta  (author)
  • Plaza Plaza, José Antonio  (author)
  • Esteve, J  (author)
  • Pérez Castillejos, Raquel  (author)
  • Valles, E  (author)
  • Gómez Valentín, Elvira  (author)