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Primary beam address error reduction in e-beam testing of packaged integrated circuits

Author
Madrenas, J.; Cabestany, J.
Type of activity
Journal article
Journal
Microelectronic engineering
Date of publication
1994-03
Volume
1
Number
24
First page
147
Last page
154
Group of research
CETpD - Technical Research Centre for Dependency Care and Autonomous Living
ISSET - Integrated Smart Sensors and Health Technologies

Participants