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E-beam detector devices for IC controllability

Author
Madrenas, J.; Cabestany, J.
Type of activity
Journal article
Journal
Microelectronic engineering
Date of publication
1992-03
Volume
16
Number
1
First page
465
Last page
472
DOI
https://doi.org/10.1016/0167-9317(92)90368-2 Open in new window
Group of research
CETpD - Technical Research Centre for Dependency Care and Autonomous Living
ISSET - Integrated Smart Sensors and Health Technologies

Participants