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Pulse drive and capacitance measurement circuit for MEMS electrostatic actuators

Autor
Fernandez, D.; Madrenas, J.; Dominguez, M.; Pons, J.; Ricart, J.
Tipus d'activitat
Article en revista
Revista
Analog integrated circuits and signal processing
Data de publicació
2008-12
Volum
57
Número
3
Pàgina inicial
225
Pàgina final
232
DOI
https://doi.org/10.1007/s10470-008-9166-9 Obrir en finestra nova
URL
http://www.springerlink.com/content/h2650550u5438338/fulltext.pdf Obrir en finestra nova
Resum
In this paper we present an electronic circuit for position or capacitance estimation of MEMS electrostatic actuators based on a switched capacitor technique. The circuit uses a capacitive divider configuration composed by a fixed capacitor and the variable capacitance of the electrostatic actuator for generating an output signal that is a function of the input voltage and capacitive ratio. The proposed circuit can be used to simultaneously actuate and sense position of an electrostatic MEMS act...
Paraules clau
Capacitance, Capacitive divider, Distance estimation, MEMS, Pulsed digital oscillators
Grup de recerca
AHA - Arquitectures Hardware Avançades
MNT - Grup de Recerca en Micro i Nanotecnologies

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