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Pulse drive and capacitance measurement circuit for MEMS electrostatic actuators

Author
Fernandez, D.; Madrenas, J.; Dominguez, M.; Pons, J.; Ricart, J.
Type of activity
Journal article
Journal
Analog integrated circuits and signal processing
Date of publication
2008-12
Volume
57
Number
3
First page
225
Last page
232
DOI
https://doi.org/10.1007/s10470-008-9166-9 Open in new window
URL
http://www.springerlink.com/content/h2650550u5438338/fulltext.pdf Open in new window
Abstract
In this paper we present an electronic circuit for position or capacitance estimation of MEMS electrostatic actuators based on a switched capacitor technique. The circuit uses a capacitive divider configuration composed by a fixed capacitor and the variable capacitance of the electrostatic actuator for generating an output signal that is a function of the input voltage and capacitive ratio. The proposed circuit can be used to simultaneously actuate and sense position of an electrostatic MEMS act...
Keywords
Capacitance, Capacitive divider, Distance estimation, MEMS, Pulsed digital oscillators
Group of research
AHA - Advanced Hardware Architectures
ISSET - Integrated Smart Sensors and Health Technologies
MNT - Micro and Nanotechnologies Research Group

Participants