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Optimization of a novel micro-opto-X-ray imaging lens

Author
Ostadi, H.; Arroyo, M.; Prewet, P.D.; Jiang, K.C.; Huq, S.E.
Type of activity
Journal article
Journal
Microelectronic engineering
Date of publication
2008-06
Volume
85
Number
5-6
First page
1086
Last page
1088
DOI
https://doi.org/10.1016/j.mee.2008.01.096 Open in new window
Repository
http://hdl.handle.net/2117/8157 Open in new window
Abstract
A mechanically deformable reflection transmission MOEMS system is capable of focusing X-rays to sub micron spots. This paper considers the geometry of the proposed deformed slotted microcantilever lens element under thermally derived strain, using finite element analysis. The work shows that an optimized MOEMS design using a slotted polyimide/gold thermal bimorph cantilever is capable of achieving ideal geometry with a larger than expected number of focusing slots – up to 111 at 2 μm width.
Citation
Ostadi, H. [et al.]. Optimization of a novel micro-opto-X-ray imaging lens. "Microelectronic engineering", Juny 2008, vol. 85, núm. 5-6, p. 1086-1088.
Group of research
LACÀN - Numerical Methods for Applied Sciences and Engineering

Participants

  • Ostadi, Hossein  (author)
  • Arroyo Balaguer, Marino  (author)
  • Prewett, P.D.  (author)
  • Jiang, K.C.  (author)
  • Huq, S.E.  (author)

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