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Deposition of polysilicon films by hot-wire CVD at low temperatures for photovoltaic applications

Author
Puigdollers, J.; Bertomeu, J.; Cifre, J.; Delgado, J.
Type of activity
Journal article
Journal
Materials research society symposia proceedings
Date of publication
1995-04
Volume
377
First page
63
Last page
68
Group of research
MNT - Micro and Nanotechnologies Research Group

Participants