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P-doped polycrystalline silicon films obtained at low temperature by hot-wire chemical vapor deposition

Author
Puigdollers, J.; Cifre, J.; Polo, M.; Asensi, J.; Bertomeu, J.; Lloret, A.
Type of activity
Journal article
Journal
Applied surface science
Date of publication
1995-11
Volume
86
First page
600
Last page
603
Group of research
MNT - Micro and Nanotechnologies Research Group
MSR - Soil and Rock Mechanics

Participants