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Structural characterization of a-SiC:H by Thermal Desorption Spectroscopy

Author
Maass, F.; Bertomeu, J.; Asensi, J.M.; Puigdollers, J.; Andreu Batallé, Jordi; Delgado, J.; Esteve, J.
Type of activity
Journal article
Journal
Applied surface science
Date of publication
1993-01
Volume
70/71
First page
768
Last page
771
Group of research
MNT - Micro and Nanotechnologies Research Group

Participants

  • Maass Artigas, Fernando  (author)
  • Bertomeu Balaguero, Joan  (author)
  • Asensi, J.M.  (author)
  • Puigdollers Gonzalez, Joaquin  (author)
  • Andreu Batallé, Jordi  (author)
  • Delgado Nieto, Juan Carlos  (author)
  • Esteve Pujol, Joan  (author)