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Nano particles in SiH4-Ar plasma: Modelling and comparison with experimental data

Author
Gordiets, F.; Inestrosa-Izurieta, M.; Navarro, A.; Bertran, E.
Type of activity
Journal article
Journal
Journal of applied physics
Date of publication
2011-11-24
Volume
110
Number
103302
First page
1
Last page
8
DOI
https://doi.org/10.1063/1.3658249 Open in new window
Repository
http://hdl.handle.net/2117/15643 Open in new window
Citation
Gordiets, F. [et al.]. Nano particles in SiH4-Ar plasma: Modelling and comparison with experimental data. "Journal of applied physics", 24 Novembre 2011, vol. 110, núm. 103302, p. 1-8.
Group of research
SPPT - Surfaces, Products and Textile Processes

Participants

  • Gordiets, F.B.  (author)
  • Inestrosa-Izurieta, M.J.  (author)
  • Navarro Santañes, Antonio  (author)
  • Bertran Serra, Enric  (author)

Attachments